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Q Series

Product Type:

Deionized Water Heaters



Ultrapure Heating for Batch Manufacturing Process
Trebor’s exclusive electric quartz DI water heating technology is trusted for long life, low maintenance and high purity. This market-leading technology is now available in the affordable Q-Series heater – a system ideal for batch cleaning applications requiring a steady flow of high purity DI water on demand. Hot DI water has been proven to improve cleaning efficiency, enhance process stability, and increase production throughput.

The modular Q-Series heater has a high purity flow path of quartz and fluoropolymer components and versatile configurations to meet a broad range of wattage and voltage requirements. A straight-forward user interface and multiple remote control options ensure that we have a system compatible with your manufacturing process.

Contact your local Trebor representative to see how the Q-Series can provide the best value solution for your high purity DI water heating applications.


Market Applications
♦ Semiconductor
♦ Solar Cell (PV)
♦ MEMS
♦ Flat Panel
♦ Optoelectronics


Product Features
♦ LEADING EDGE TECHNOLOGY - Patented thin-film on quartsz electrical resistance heater element provides exceptional temperature response and improved reliability over IR heating which requires frequent bulb change outs. The propriety design has no metal exposure and virtually eliminates contamination risk in the event of element failure, unlike most immersion style heaters. No external air or nitrogen purge is required.

♦ VERSATILE CONTROL OPTIONS - Standard Modbus/RTU-serial communication. Many other remote system monitoring and control options available to meet virtually communication requirements and protocols.

♦ COMPACT & CONVENIENT - The modular element allows for very compact system design and can be changed out in less than 15 minutes when required. Simple control interface provides easy user input and diagnostic feedback.

♦ HIGH PERFORMANCE - Efficient heat transfer and low resident fluid volume in each heater module produces fast response to changes in flow or temperature set point using a PID control with zero crossfire SSRs.

♦ ULTRA CLEAN DESIGN - High purity flow path of GE 214 semiconductor grade quartz, PTFE, PFA, and PVDF with no elastomer o-rings.

♦ SAFETY COMPLIANT - TUV third party compliance testing and inspection to CE, SEMI S2 & S8, and NFPA79 standards.


Specifications
Heater Type Thin-film on quartz electric resistive heating
Voltages 208,380,415,480 Volt; 50/60 Hz
Temperature Limit 95°C
Temperature Control ±0.5°C in most conditions
Pressure Range 15 to 60 PSI DI water supply
Flow Rate 1 to 45 LPM (.25 to 12 GPM); depending on system size
Efficiency >98%
Element Life >20,000 hrs
Control System Zero crossfire SSRs with multi-loop PID control
Communication Options Modbus/RTU - Serial (standard),
Modbus/TCP - Ethernet, DeviceNet
Wetted Surfaces GE 214 quartz, PTFE, PFA, & PVDF - no elastomer O-rings
Safety Features Low pressure shutdown
Low liquid level detection shutdown
Redundant over temperature protection
Over pressure relief
Open thermocouple detection
Automatic power shutdown
EMO
GFI/Earth Leakage
Certifications SEMI S2-0703 CE
SEMI S8-0701 NFPA79
Warranty 1-year standard, extended warranties available